Sic as a Promising Material for MEMS/NEMS: A Review
SIC has excellent mechanical and electrical properties that make it very promising material/candidate for
MEMS/NEMS. This paper highlights some of the SiC properties that makes it more suitable, over conventional Si, for
MEMS/NEMS applications. These applications include; high frequency resonators, RF MEMS, electrothermal actuators, and
harsh environment applications. The aim of the paper is to review some of the very promising results which demonstrate that
SiC as a potential material for each of the aforementioned applications.
Keywords – Micro Electromechanical Systems, Electrostatic Actuation, Electro Thermal Actuators, RF MEMS, high