A Novel Multi Axis Inductive Displacement Sensor
This paper presents a novel multi axis inductive displacement sensor design and analysis. The proposed sensor
capable to measure the displacement and also tilt angle of the objects without contact. First, an analytical model is developed
to express the measurement principle. Then 3D finite element analysis (FEA) is performed to verify analytical model by
using Ansys Maxwell software. In the analysis, 0-5 mm linear movement and 0-3° tilt angle are considered. Finally, an
experimental setup is built and performance tests are performed.
Keywords - Inductive Sensor, Displacement Measurement, Tilt Angle