International Journal of Mechanical and Production Engineering (IJMPE)
.
current issues
Volume-8,Issue-9  ( Sep, 2020 )
Past issues
  1. Volume-8,Issue-8  ( Aug, 2020 )
  2. Volume-8,Issue-7  ( Jul, 2020 )
  3. Volume-8,Issue-6  ( Jun, 2020 )
  4. Volume-8,Issue-5  ( May, 2020 )
  5. Volume-8,Issue-4  ( Apr, 2020 )
  6. Volume-8,Issue-3  ( Mar, 2020 )
  7. Volume-8,Issue-2  ( Feb, 2020 )
  8. Volume-8,Issue-1  ( Jan, 2020 )
  9. Volume-7,Issue-12  ( Dec, 2019 )
  10. Volume-7,Issue-11  ( Nov, 2019 )

Statistics report
Jan. 2021
Submitted Papers : 80
Accepted Papers : 10
Rejected Papers : 70
Acc. Perc : 12%
Issue Published : 90
Paper Published : 2068
No. of Authors : 5897
  Journal Paper


Paper Title :
Sic as a Promising Material for MEMS/NEMS: A Review

Author :Musaab Zarog

Article Citation :Musaab Zarog , (2017 ) " Sic as a Promising Material for MEMS/NEMS: A Review " , International Journal of Mechanical and Production Engineering (IJMPE) , pp. 84-86, Volume-5,Issue-12

Abstract : SIC has excellent mechanical and electrical properties that make it very promising material/candidate for MEMS/NEMS. This paper highlights some of the SiC properties that makes it more suitable, over conventional Si, for MEMS/NEMS applications. These applications include; high frequency resonators, RF MEMS, electrothermal actuators, and harsh environment applications. The aim of the paper is to review some of the very promising results which demonstrate that SiC as a potential material for each of the aforementioned applications. Keywords – Micro Electromechanical Systems, Electrostatic Actuation, Electro Thermal Actuators, RF MEMS, high frequency, Resonators.

Type : Research paper


Copyright: © Institute of Research and Journals

| PDF |
Viewed - 36
| Published on 2018-02-09
   
   
IRAJ Other Journals
IJMPE updates
We are happy to announce that Dr. R. A. SAVANUR joined as the CHief Editor for IJMPE.
The Conference World

JOURNAL SUPPORTED BY