Paper Title :Sic as a Promising Material for MEMS/NEMS: A Review
Author :Musaab Zarog
Article Citation :Musaab Zarog ,
(2017 ) " Sic as a Promising Material for MEMS/NEMS: A Review " ,
International Journal of Mechanical and Production Engineering (IJMPE) ,
pp. 84-86,
Volume-5,Issue-12
Abstract : SIC has excellent mechanical and electrical properties that make it very promising material/candidate for
MEMS/NEMS. This paper highlights some of the SiC properties that makes it more suitable, over conventional Si, for
MEMS/NEMS applications. These applications include; high frequency resonators, RF MEMS, electrothermal actuators, and
harsh environment applications. The aim of the paper is to review some of the very promising results which demonstrate that
SiC as a potential material for each of the aforementioned applications.
Keywords – Micro Electromechanical Systems, Electrostatic Actuation, Electro Thermal Actuators, RF MEMS, high
frequency, Resonators.
Type : Research paper
Published : Volume-5,Issue-12
Copyright: © Institute of Research and Journals
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Published on 2018-02-09 |
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